2/13/2011	11:51:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2011	11:51:08 AM	Recipe started at 11:51 AM
2/13/2011	11:51:08 AM	H2 valve closed
2/13/2011	11:51:08 AM	BCl3 valve closed
2/13/2011	11:51:08 AM	PH3 valve closed
2/13/2011	11:51:08 AM	SiCl4 pre valve closed
2/13/2011	11:51:08 AM	SiCl4 post valve closed
2/13/2011	11:51:08 AM	Main Vac valve closed
2/13/2011	11:51:08 AM	Bypass valve closed
2/13/2011	11:51:08 AM	Bubbler valve closed
2/13/2011	11:51:08 AM	Helium valve opened
2/13/2011	11:51:08 AM	Helium MFC set to  500.000000
2/13/2011	11:51:08 AM	H2 MFC set to  0.000000
2/13/2011	11:51:08 AM	BCl3 MFC set to  0.000000
2/13/2011	11:51:08 AM	PHl3 MFC set to  0.000000
2/13/2011	11:51:08 AM	SiCl4 MFC set to  0.000000
2/13/2011	11:51:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2011	11:51:09 AM	Tube furnace set to 0
2/13/2011	11:52:28 AM	Helium valve closed
2/13/2011	11:52:28 AM	H2 valve closed
2/13/2011	11:52:28 AM	BCl3 valve closed
2/13/2011	11:52:28 AM	PH3 valve closed
2/13/2011	11:52:28 AM	SiCl4 pre valve closed
2/13/2011	11:52:28 AM	SiCl4 post valve closed
2/13/2011	11:52:28 AM	Main Vac valve closed
2/13/2011	11:52:28 AM	Bypass valve closed
2/13/2011	11:52:28 AM	Bubbler valve closed
2/13/2011	11:52:28 AM	Helium MFC set to  0.000000
2/13/2011	11:52:28 AM	H2 MFC set to  0.000000
2/13/2011	11:52:28 AM	BCl3 MFC set to  0.000000
2/13/2011	11:52:28 AM	PHl3 MFC set to  0.000000
2/13/2011	11:52:28 AM	SiCl4 MFC set to  0.000000
2/13/2011	11:52:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2011	11:52:28 AM	Tube furnace set to 0
2/13/2011	11:52:28 AM	Run finished at 11:52 AM
2/13/2011	11:52:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2011	11:55:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2011	11:55:27 AM	Recipe started at 11:55 AM
2/13/2011	11:55:27 AM	Helium valve closed
2/13/2011	11:55:27 AM	H2 valve closed
2/13/2011	11:55:27 AM	BCl3 valve closed
2/13/2011	11:55:27 AM	PH3 valve closed
2/13/2011	11:55:27 AM	SiCl4 pre valve closed
2/13/2011	11:55:27 AM	SiCl4 post valve closed
2/13/2011	11:55:27 AM	Main Vac valve closed
2/13/2011	11:55:27 AM	Bubbler valve closed
2/13/2011	11:55:27 AM	Bypass valve opened
2/13/2011	11:55:27 AM	Helium MFC set to  0.000000
2/13/2011	11:55:27 AM	H2 MFC set to  0.000000
2/13/2011	11:55:27 AM	BCl3 MFC set to  0.000000
2/13/2011	11:55:27 AM	PHl3 MFC set to  0.000000
2/13/2011	11:55:27 AM	SiCl4 MFC set to  0.000000
2/13/2011	11:55:27 AM	Bypass solenoid MFC set to  0.000000
2/13/2011	11:55:28 AM	Tube furnace set to 0
2/13/2011	11:55:59 AM	Helium valve closed
2/13/2011	11:55:59 AM	H2 valve closed
2/13/2011	11:55:59 AM	BCl3 valve closed
2/13/2011	11:55:59 AM	PH3 valve closed
2/13/2011	11:55:59 AM	SiCl4 pre valve closed
2/13/2011	11:55:59 AM	SiCl4 post valve closed
2/13/2011	11:55:59 AM	Bubbler valve closed
2/13/2011	11:55:59 AM	Main Vac valve opened
2/13/2011	11:55:59 AM	Bypass valve opened
2/13/2011	11:55:59 AM	Helium MFC set to  0.000000
2/13/2011	11:55:59 AM	H2 MFC set to  0.000000
2/13/2011	11:55:59 AM	BCl3 MFC set to  0.000000
2/13/2011	11:55:59 AM	PHl3 MFC set to  0.000000
2/13/2011	11:55:59 AM	SiCl4 MFC set to  0.000000
2/13/2011	11:55:59 AM	Bypass solenoid MFC set to  0.000000
2/13/2011	11:55:59 AM	Tube furnace set to 0
2/13/2011	11:55:59 AM	Run finished at 11:55 AM
2/13/2011	11:55:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2011	12:00:15 PM	Helium MFC set to  60.000000
2/13/2011	12:00:18 PM	Helium valve opened
2/13/2011	12:00:58 PM	Helium valve closed
2/13/2011	12:01:31 PM	Helium valve opened
2/13/2011	12:04:01 PM	Helium valve closed
2/13/2011	12:04:59 PM	Helium valve opened
2/13/2011	12:05:05 PM	Tube furnace set to 50
2/13/2011	12:10:51 PM	Helium valve closed
2/13/2011	12:12:18 PM	Main Vac valve closed
2/13/2011	12:12:20 PM	Bypass valve closed
2/13/2011	12:12:39 PM	Bypass valve opened
2/13/2011	12:12:39 PM	Main Vac valve opened
2/13/2011	12:12:46 PM	Helium valve opened
2/13/2011	12:12:50 PM	Helium MFC set to  100.000000
2/13/2011	12:13:42 PM	Helium valve closed
2/13/2011	12:13:45 PM	Helium MFC set to  0.000000
2/13/2011	12:13:54 PM	Tube furnace set to 100
2/13/2011	12:15:16 PM	Recipe started at 12:15 PM
2/13/2011	12:15:16 PM	Helium valve closed
2/13/2011	12:15:16 PM	BCl3 valve closed
2/13/2011	12:15:16 PM	PH3 valve closed
2/13/2011	12:15:16 PM	SiCl4 pre valve closed
2/13/2011	12:15:16 PM	SiCl4 post valve closed
2/13/2011	12:15:16 PM	Main Vac valve closed
2/13/2011	12:15:16 PM	Bypass valve closed
2/13/2011	12:15:16 PM	Bubbler valve closed
2/13/2011	12:15:16 PM	H2 valve opened
2/13/2011	12:15:16 PM	Helium MFC set to  0.000000
2/13/2011	12:15:16 PM	H2 MFC set to  500.000000
2/13/2011	12:15:16 PM	BCl3 MFC set to  0.000000
2/13/2011	12:15:16 PM	PHl3 MFC set to  0.000000
2/13/2011	12:15:16 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:15:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:15:16 PM	Tube furnace set to 100
2/13/2011	12:16:35 PM	Helium valve closed
2/13/2011	12:16:35 PM	BCl3 valve closed
2/13/2011	12:16:35 PM	PH3 valve closed
2/13/2011	12:16:35 PM	SiCl4 pre valve closed
2/13/2011	12:16:35 PM	SiCl4 post valve closed
2/13/2011	12:16:35 PM	Main Vac valve closed
2/13/2011	12:16:35 PM	Bypass valve closed
2/13/2011	12:16:35 PM	H2 valve opened
2/13/2011	12:16:35 PM	Bubbler valve opened
2/13/2011	12:16:35 PM	Helium MFC set to  0.000000
2/13/2011	12:16:35 PM	H2 MFC set to  400.000000
2/13/2011	12:16:35 PM	BCl3 MFC set to  0.000000
2/13/2011	12:16:35 PM	PHl3 MFC set to  0.000000
2/13/2011	12:16:35 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:16:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:16:35 PM	Tube furnace set to 1000
2/13/2011	12:36:35 PM	Helium valve closed
2/13/2011	12:36:35 PM	PH3 valve closed
2/13/2011	12:36:35 PM	Main Vac valve closed
2/13/2011	12:36:35 PM	Bypass valve closed
2/13/2011	12:36:35 PM	H2 valve opened
2/13/2011	12:36:35 PM	BCl3 valve opened
2/13/2011	12:36:35 PM	SiCl4 pre valve opened
2/13/2011	12:36:35 PM	SiCl4 post valve opened
2/13/2011	12:36:35 PM	Bubbler valve opened
2/13/2011	12:36:35 PM	Helium MFC set to  0.000000
2/13/2011	12:36:35 PM	H2 MFC set to  500.000000
2/13/2011	12:36:35 PM	BCl3 MFC set to  5.000000
2/13/2011	12:36:35 PM	PHl3 MFC set to  0.000000
2/13/2011	12:36:35 PM	SiCl4 MFC set to  50.000000
2/13/2011	12:36:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:36:35 PM	Tube furnace set to 1000
2/13/2011	12:46:35 PM	H2 valve closed
2/13/2011	12:46:35 PM	BCl3 valve closed
2/13/2011	12:46:35 PM	PH3 valve closed
2/13/2011	12:46:35 PM	SiCl4 pre valve closed
2/13/2011	12:46:35 PM	SiCl4 post valve closed
2/13/2011	12:46:35 PM	Main Vac valve closed
2/13/2011	12:46:35 PM	Bypass valve closed
2/13/2011	12:46:35 PM	Helium valve opened
2/13/2011	12:46:35 PM	Bubbler valve opened
2/13/2011	12:46:35 PM	Helium MFC set to  400.000000
2/13/2011	12:46:35 PM	H2 MFC set to  0.000000
2/13/2011	12:46:36 PM	BCl3 MFC set to  0.000000
2/13/2011	12:46:36 PM	PHl3 MFC set to  0.000000
2/13/2011	12:46:36 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:46:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:46:36 PM	Tube furnace set to 0
2/13/2011	12:54:35 PM	Helium valve closed
2/13/2011	12:54:35 PM	H2 valve closed
2/13/2011	12:54:35 PM	BCl3 valve closed
2/13/2011	12:54:35 PM	PH3 valve closed
2/13/2011	12:54:35 PM	SiCl4 pre valve closed
2/13/2011	12:54:35 PM	SiCl4 post valve closed
2/13/2011	12:54:35 PM	Main Vac valve closed
2/13/2011	12:54:35 PM	Bypass valve closed
2/13/2011	12:54:35 PM	Bubbler valve closed
2/13/2011	12:54:35 PM	Helium MFC set to  0.000000
2/13/2011	12:54:35 PM	H2 MFC set to  0.000000
2/13/2011	12:54:35 PM	BCl3 MFC set to  0.000000
2/13/2011	12:54:35 PM	PHl3 MFC set to  0.000000
2/13/2011	12:54:35 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:54:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:54:35 PM	Tube furnace set to 0
2/13/2011	12:54:35 PM	Run finished at 12:54 PM
2/13/2011	12:56:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2011	12:56:46 PM	Recipe started at 12:56 PM
2/13/2011	12:56:46 PM	Helium valve closed
2/13/2011	12:56:46 PM	H2 valve closed
2/13/2011	12:56:46 PM	BCl3 valve closed
2/13/2011	12:56:46 PM	PH3 valve closed
2/13/2011	12:56:46 PM	SiCl4 pre valve closed
2/13/2011	12:56:46 PM	SiCl4 post valve closed
2/13/2011	12:56:46 PM	Main Vac valve closed
2/13/2011	12:56:46 PM	Bubbler valve closed
2/13/2011	12:56:46 PM	Bypass valve opened
2/13/2011	12:56:46 PM	Helium MFC set to  0.000000
2/13/2011	12:56:46 PM	H2 MFC set to  0.000000
2/13/2011	12:56:46 PM	BCl3 MFC set to  0.000000
2/13/2011	12:56:46 PM	PHl3 MFC set to  0.000000
2/13/2011	12:56:46 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:56:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:56:46 PM	Tube furnace set to 0
2/13/2011	12:57:14 PM	Helium valve closed
2/13/2011	12:57:14 PM	H2 valve closed
2/13/2011	12:57:14 PM	BCl3 valve closed
2/13/2011	12:57:14 PM	PH3 valve closed
2/13/2011	12:57:14 PM	SiCl4 pre valve closed
2/13/2011	12:57:14 PM	SiCl4 post valve closed
2/13/2011	12:57:14 PM	Bubbler valve closed
2/13/2011	12:57:14 PM	Main Vac valve opened
2/13/2011	12:57:14 PM	Bypass valve opened
2/13/2011	12:57:14 PM	Helium MFC set to  0.000000
2/13/2011	12:57:14 PM	H2 MFC set to  0.000000
2/13/2011	12:57:14 PM	BCl3 MFC set to  0.000000
2/13/2011	12:57:14 PM	PHl3 MFC set to  0.000000
2/13/2011	12:57:14 PM	SiCl4 MFC set to  0.000000
2/13/2011	12:57:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	12:57:15 PM	Tube furnace set to 0
2/13/2011	12:57:15 PM	Run finished at 12:57 PM
2/13/2011	12:57:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2011	1:04:23 PM	Helium MFC set to  100.000000
2/13/2011	1:04:24 PM	Helium valve opened
2/13/2011	1:04:31 PM	Helium valve closed
2/13/2011	2:44:24 PM	Recipe started at 2:44 PM
2/13/2011	2:44:24 PM	Helium valve closed
2/13/2011	2:44:24 PM	BCl3 valve closed
2/13/2011	2:44:24 PM	PH3 valve closed
2/13/2011	2:44:24 PM	SiCl4 pre valve closed
2/13/2011	2:44:24 PM	SiCl4 post valve closed
2/13/2011	2:44:24 PM	Main Vac valve closed
2/13/2011	2:44:24 PM	Bypass valve closed
2/13/2011	2:44:24 PM	Bubbler valve closed
2/13/2011	2:44:24 PM	H2 valve opened
2/13/2011	2:44:24 PM	Helium MFC set to  0.000000
2/13/2011	2:44:24 PM	H2 MFC set to  500.000000
2/13/2011	2:44:24 PM	BCl3 MFC set to  0.000000
2/13/2011	2:44:24 PM	PHl3 MFC set to  0.000000
2/13/2011	2:44:24 PM	SiCl4 MFC set to  0.000000
2/13/2011	2:44:24 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	2:44:24 PM	Tube furnace set to 100
2/13/2011	2:45:41 PM	Helium valve closed
2/13/2011	2:45:41 PM	BCl3 valve closed
2/13/2011	2:45:41 PM	PH3 valve closed
2/13/2011	2:45:41 PM	SiCl4 pre valve closed
2/13/2011	2:45:41 PM	SiCl4 post valve closed
2/13/2011	2:45:41 PM	Main Vac valve closed
2/13/2011	2:45:41 PM	Bypass valve closed
2/13/2011	2:45:41 PM	H2 valve opened
2/13/2011	2:45:41 PM	Bubbler valve opened
2/13/2011	2:45:41 PM	Helium MFC set to  0.000000
2/13/2011	2:45:41 PM	H2 MFC set to  400.000000
2/13/2011	2:45:41 PM	BCl3 MFC set to  0.000000
2/13/2011	2:45:41 PM	PHl3 MFC set to  0.000000
2/13/2011	2:45:41 PM	SiCl4 MFC set to  0.000000
2/13/2011	2:45:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	2:45:42 PM	Tube furnace set to 1000
2/13/2011	3:00:42 PM	Helium valve closed
2/13/2011	3:00:42 PM	BCl3 valve closed
2/13/2011	3:00:42 PM	PH3 valve closed
2/13/2011	3:00:42 PM	Main Vac valve closed
2/13/2011	3:00:42 PM	Bypass valve closed
2/13/2011	3:00:42 PM	H2 valve opened
2/13/2011	3:00:42 PM	SiCl4 pre valve opened
2/13/2011	3:00:42 PM	SiCl4 post valve opened
2/13/2011	3:00:42 PM	Bubbler valve opened
2/13/2011	3:00:42 PM	Helium MFC set to  0.000000
2/13/2011	3:00:42 PM	H2 MFC set to  500.000000
2/13/2011	3:00:42 PM	BCl3 MFC set to  0.000000
2/13/2011	3:00:42 PM	PHl3 MFC set to  0.000000
2/13/2011	3:00:42 PM	SiCl4 MFC set to  50.000000
2/13/2011	3:00:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	3:00:42 PM	Tube furnace set to 1000
2/13/2011	4:00:42 PM	H2 valve closed
2/13/2011	4:00:42 PM	BCl3 valve closed
2/13/2011	4:00:42 PM	PH3 valve closed
2/13/2011	4:00:42 PM	SiCl4 pre valve closed
2/13/2011	4:00:42 PM	SiCl4 post valve closed
2/13/2011	4:00:42 PM	Main Vac valve closed
2/13/2011	4:00:42 PM	Bypass valve closed
2/13/2011	4:00:42 PM	Helium valve opened
2/13/2011	4:00:42 PM	Bubbler valve opened
2/13/2011	4:00:42 PM	Helium MFC set to  400.000000
2/13/2011	4:00:42 PM	H2 MFC set to  0.000000
2/13/2011	4:00:42 PM	BCl3 MFC set to  0.000000
2/13/2011	4:00:42 PM	PHl3 MFC set to  0.000000
2/13/2011	4:00:42 PM	SiCl4 MFC set to  0.000000
2/13/2011	4:00:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	4:00:42 PM	Tube furnace set to 0
2/13/2011	4:12:28 PM	Helium valve closed
2/13/2011	4:12:28 PM	H2 valve closed
2/13/2011	4:12:28 PM	BCl3 valve closed
2/13/2011	4:12:28 PM	PH3 valve closed
2/13/2011	4:12:28 PM	SiCl4 pre valve closed
2/13/2011	4:12:28 PM	SiCl4 post valve closed
2/13/2011	4:12:28 PM	Main Vac valve closed
2/13/2011	4:12:28 PM	Bypass valve closed
2/13/2011	4:12:28 PM	Bubbler valve closed
2/13/2011	4:12:28 PM	Helium MFC set to  0.000000
2/13/2011	4:12:28 PM	H2 MFC set to  0.000000
2/13/2011	4:12:28 PM	BCl3 MFC set to  0.000000
2/13/2011	4:12:28 PM	PHl3 MFC set to  0.000000
2/13/2011	4:12:28 PM	SiCl4 MFC set to  0.000000
2/13/2011	4:12:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	4:12:28 PM	Tube furnace set to 0
2/13/2011	4:12:28 PM	Run finished at 4:12 PM
2/13/2011	4:12:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2011	4:12:33 PM	Recipe started at 4:12 PM
2/13/2011	4:12:34 PM	Helium valve closed
2/13/2011	4:12:34 PM	H2 valve closed
2/13/2011	4:12:34 PM	BCl3 valve closed
2/13/2011	4:12:34 PM	PH3 valve closed
2/13/2011	4:12:34 PM	SiCl4 pre valve closed
2/13/2011	4:12:34 PM	SiCl4 post valve closed
2/13/2011	4:12:34 PM	Main Vac valve closed
2/13/2011	4:12:34 PM	Bubbler valve closed
2/13/2011	4:12:34 PM	Bypass valve opened
2/13/2011	4:12:34 PM	Helium MFC set to  0.000000
2/13/2011	4:12:34 PM	H2 MFC set to  0.000000
2/13/2011	4:12:34 PM	BCl3 MFC set to  0.000000
2/13/2011	4:12:34 PM	PHl3 MFC set to  0.000000
2/13/2011	4:12:34 PM	SiCl4 MFC set to  0.000000
2/13/2011	4:12:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	4:12:34 PM	Tube furnace set to 0
2/13/2011	4:12:54 PM	Helium valve closed
2/13/2011	4:12:54 PM	H2 valve closed
2/13/2011	4:12:54 PM	BCl3 valve closed
2/13/2011	4:12:54 PM	PH3 valve closed
2/13/2011	4:12:54 PM	SiCl4 pre valve closed
2/13/2011	4:12:54 PM	SiCl4 post valve closed
2/13/2011	4:12:54 PM	Bubbler valve closed
2/13/2011	4:12:54 PM	Main Vac valve opened
2/13/2011	4:12:54 PM	Bypass valve opened
2/13/2011	4:12:54 PM	Helium MFC set to  0.000000
2/13/2011	4:12:54 PM	H2 MFC set to  0.000000
2/13/2011	4:12:54 PM	BCl3 MFC set to  0.000000
2/13/2011	4:12:54 PM	PHl3 MFC set to  0.000000
2/13/2011	4:12:54 PM	SiCl4 MFC set to  0.000000
2/13/2011	4:12:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2011	4:12:54 PM	Tube furnace set to 0
2/13/2011	4:12:55 PM	Run finished at 4:12 PM
2/13/2011	4:12:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
